Chamber & vacuum components
Chamber bodies, lids, flanges and port plates. Ground sealing faces, controlled edge break, no tool marks on the vacuum side.
SEMICONDUCTOR EQUIPMENT · 5-AXIS · GRINDING
Semiconductor equipment parts, machined and ground.
Chamber components, flanges, feed-through housings and test-fixture plates in aluminium and stainless. 5-axis machined, ground where flatness matters, and shipped with dimensional and material reports.
WHAT WE SOURCE
Parts between the wafer and the outside world.
Most of this work is one-off or low volume, revised twice before release, and judged on flatness, hole position and surface condition rather than cycle time.
Feed-through & connector housings
Insulator housings, pin carriers and mounting bosses with tight position tolerance across multiple faces.
Test fixture & probe plates
Probe cards, socket plates and alignment plates with dense hole patterns and flatness held across the full plate.
Brackets & structural parts
Sensor mounts, cable brackets and gantry parts — usually 5-axis, often anodized black.
Electrode & insulator parts
Plates and rings machined from aluminium or engineering plastics, deburred and cleaned before bagging.
Replacement & spare parts
Reverse-engineered from a sample or drawing when the OEM lead time is measured in months.
0.005 mmGeneral tolerance
0.01 mmFlatness on plates
0.4 µmSealing-face finish
5Axis simultaneous
MATERIALS & FINISHES
The right alloy,
and a finish that survives it.
Semiconductor work rarely fails on dimensions alone. It fails on porosity, edge burrs, trapped moisture or a coating that flakes in vacuum. We pick the alloy for the chamber, not for the price list.
- Mill certificates traced to heat number
- Anodize masking on threads, bores and contact areas
- Demagnetizing after grinding, on request
- Controlled edge break on vacuum-facing surfaces
- Parts degreased and bagged individually
| AL 6061-T6 | Chamber bodies, plates · clear or black anodize |
|---|---|
| A5052 / A5056 | Housings, brackets · hard anodize, sandblast |
| SS 316L | Vacuum-side fittings · passivation, electropolish option |
| ASTM A582 | Turned details · passivation |
| PEEK / POM | Insulators, guides · machined, annealed on request |
TOLERANCES & FINISH
Held on the face that seals,
not just the drawing.
A part can be within tolerance and still leak. We control flatness, surface finish and edge condition on the sealing faces, and report them separately.
- 01
5-axis in one setup
Angled ports, pockets and bosses without re-datuming.
- 02
Ground sealing faces
Flatness and Ra verified, not assumed.
- 03
Demagnetized on request
For parts that see charged beams or sensitive sensors.
| Materials | AL 6061, A5052, A5056, SS 316L, ASTM A582 |
|---|---|
| General tolerance | ±0.005 mm |
| Flatness | 0.01 mm typical on plates |
| Surface finish | Ra 0.4 µm ground; Ra 1.6 µm milled |
| Edge condition | Controlled deburr, no sharp edges on vacuum side |
| Finishes | Anodize (clear/black/hard), sandblast, polish, demagnetize |
| Cleaning | Degreased, bagged, handled with gloves |
| Documentation | CMM report, material cert by heat number |
| Typical lead time | 5–10 working days for samples |
FROM DRAWING TO DOCK
What happens after you send the STEP file.
- 1
Drawing review
DFM notes within one business day: datums, features that need grinding, finishes that won't survive.
- 2
Material & route
Alloy and stock size fixed, mill cert ordered, process route agreed before any cutting.
- 3
Machine & grind
5-axis or turn-mill first, then grinding on the faces that seal or locate.
- 4
Measure & document
CMM report, flatness and finish checks, material cert matched to the batch.
- 5
Clean, bag, ship
Degreased, handled with gloves, bagged individually, DDP or DAP to your dock.
WORK
Representative parts.
Anodized platen
Ring flange
Fixture plate
5-axis bracket
Small details
Set-up on the table
FAQ
What engineers ask first.
Do you machine vacuum-side parts?
Yes, from solid stock — no welds on the vacuum boundary unless you specify them. We can hold flatness and finish on sealing faces and supply the measurement report.
Can you anodize to a specific colour and masking?
Yes. Clear, black and hard anodize with masking on threads, bores and electrical contact areas. Colour is matched to your sample or RAL code.
Is the shop cleanroom certified?
No, and we won't pretend otherwise. Parts are degreased, bagged and handled with gloves; if you need a specific cleaning protocol or particle count, send the spec and we'll say honestly whether we can meet it.
How fast can I get a first article?
Five to ten working days for most single parts, including material purchase. Complex multi-setup parts take longer; we'll tell you before you order.
Do you work to SEMI standards?
We have parts machined and inspected to the drawing and the standard you cite — dimensions, surface finish, edge condition and material. We don't issue SEMI compliance certificates ourselves; if you need third-party certification, we'll arrange the inspection body and quote it separately.
What happens when the drawing changes mid-program?
New revision, new part number, fresh first-article check. We won't quietly update a running batch — and if a change makes a feature ungrindable, you'll hear it before the chips fly.
Send a drawing. Get a process route and a price.
No obligation, and we'll flag anything in the drawing that will cost you money later.